Atomic-scale diamond finishing depends on balancing material removal with #surfaceintegrity. This review examines multi-physical field coupling polishing and the #mechanisms enabling ultra-smooth, damage-free surfaces.

Atomic-scale diamond finishing depends on balancing material removal with #surfaceintegrity. This review examines multi-physical field coupling polishing and the #mechanisms enabling ultra-smooth, damage-free surfaces.
Closed-loop #Nanomanufacturing demands precise, non-destructive verification.
A self-reporting DETC integrates STED-inspired printing with dual-mode #Imaging for in situ #Fabrication assessment of complex #Nanostructures.