[2024 OPEN ACCESS]
Impact of post-deposition annealing on SiO2/SiC interfaces formed by plasma nitridation of the SiC surface and SiO2 deposition
2024 Appl. Phys. Express 17 116503

iopscience.iop.org/article/10.3...

#APEX
#Physics
#OpenAccess
#SiC
#Silicon
#carbide
#MOS
#interface
#density