[Open Access]
Fabrication of β-Ga2O3/air-gap structures on (010) β-Ga2O3 by wet etching in tetramethylammonium hydroxide (TMAH)
2025 Appl. Phys. Express 18 116501

iopscience.iop.org/article/10.3...

#APEX
#OpenAccess
#Physics
#Ga2O3
#TMAH
#cantilever
#bridge
#etching
#MEMS