[2025 Open Access]
Direct phase-compensation method of piezoelectric resonant MEMS scanners through control of driving signal phase and duty cycle
2025 Appl. Phys. Express 18 127001

iopscience.iop.org/article/10.3...

#APEX
#OpenAccess
#Physics
#MEMS
#micromirror
#Piezoelectric
#actuator
#phase